Shawon, Md Jubayer Shawon, and Feng Li. “A Review of the Building Blocks of Silicon Photonics: From Fabrication Perspective”. Semiconductor Science and Information Devices 1, no. 1 (April 30, 2019): 29–35. Accessed July 22, 2024. https://journals.bilpubgroup.com/index.php/ssid/article/view/1282.