1.
Shawon MJS, Li F. A Review of the Building Blocks of Silicon Photonics: From Fabrication Perspective. semicond. sci. and inf. n.a. [Internet]. 2019 Oct. 31 [cited 2024 Mar. 29];1(1):29-35. Available from: https://journals.bilpubgroup.com/index.php/ssid/article/view/1282