Hanna Oleksandrivna Postelnyk
Kharkiv Polytechnic Institute, National Technical University, Kharkiv, 61002, Ukraine
O.V. Sobol
Kharkiv Polytechnic Institute, National Technical University, Kharkiv, 61002, Ukraine
O. Chocholaty
University of West Bohemia, Univerzitní 2732/8, 301 00 Pilsen, Czech Republic
G.I. Zelenskaya
Kharkiv Polytechnic Institute, National Technical University, Kharkiv, 61002, Ukraine
The influence of deposition modes on the phase-structural state, corrosion resistance, and adhesive strength of vacuum-arc multi-period NbN/Cu coatings is studied. It was found that in thin layers (about 8 nm, in a constant rotation mode), regardless of the change in the pressure of the nitrogen atmosphere, a metastable δ - NbN phase forms (cubic crystal lattice of the NaCl type). At a layer thickness of ~ 40 nm or more, a phase composition changes from the metastable δ - NbN to the equilibrium ε - NbN phase with a hexagonal crystal lattice. In the presence of the ε - NbN phase in the niobium nitride layers, the highest adhesive strength is achieved with a value of LС5 = 96.5 N. Corrosion resistance tests have shown that for all the studied samples the corrosion process has mainly an anodic reaction. The highest corrosion resistance was shown by coatings obtained at a pressure of 7·10-4 Torr, with the smallest bias potential of -50 V and the smallest layer thickness; with a thickness of such a coating of about 10 microns, its service life in the environment of the formation of chloride ions is about a year.
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Copyright © 2020 Hanna Oleksandrivna Postelnyk
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