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Ge-based Medium Wave Infrared MCT 1280 × 1024 Focal Plane Detector
DOI:
https://doi.org/10.30564/jeisr.v4i1.4232Abstract
Medium-wave HgCdTe thin films grown on germanium-based substrates by molecular beam epitaxy were treated by large area n-on-p injection junction and flip-flop mixing process. The chips interconnected with low-noise and multimodal options readout circuit composed a 1280×1024 Medium-wave Infrared Focal Plane Cooling Detector whose pixel spacing was 15 microns. Its main photoelectric properties are average NETD equivalent to 18.5 mK, non-uniformity equivalent to 7.5%, operability equivalent to 98.97%. The paper also studies the substrate-removal technique on Germanium-based chip, which improves the stability and reliability of detector.
Keywords:
Germanium substrate; Megapixel; Mercury cadmium tellurium; Medium wave focal plane detector; Back thinningReferences
[1] Nelms, N., Minoglou, K., Voland, C., et al., 2015. Visible and infrared detector development supported by the European Space Agency. Proceedings of SPIE. 9639, 96390O.
[2] Yang, J.R., 2012. Physics and technology of HgCdTe materials. Beijing: National Defense Industry Press.
[3] Li, Y.H., Yang, Ch.Zh., et al., August 2015. Molecular beam epitaxy CdTe films on 4-inch Ge substrates The 11th National molecular beam epitaxy conference.
[4] Yang, Ch.Zh., Li, Y.H., et al., August 2015. Pretreatment of 3-inch Ge (211) substrate for MBE growth. 2015 academic conference of China Optical Society.
[5] He, L., Yang, D.J., Ni, G.Q., et al., 2011. Introduction to advanced focal plane technology. Beijing: National Defense Industry Press.
[6] Tian, L.P., Zhu, Y.F., Liu, X.Y., et al., 2013. Infrared technology. 35(10), 629-631.
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